参考文献

Veeco CNT ALD customers are at the leading edge of ALD research around the world resulting in more publications than on any other commercial ALD platforms.

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Fabrication and electrical characterization of sub-micron diameter through-silicon via for heterogeneous three-dimensional integrated circuits

Author(s): Abbaspour, R: Brown, D K: Bakir, M S

Published: 2017

Web link: http://iopscience.iop.org/article/10.1088/1361-6439/aa544c

Temperature and Electric Field Induced Metal-Insulator Transition in Atomic Layer Deposited VO2 Thin Films

Author(s): Tadjer, Marko J, Wheeler, Virginia D, Downey, Brian, Robinson, Zachary R, Meyer, David J, Eddy Jr, Charles R and Kub, Fritz J

Published: 2017

Web link: http://linkinghub.elsevier.com/retrieve/pii/S0038110117304264

Nonplasmonic Hot?Electron Photocurrents from Mn?Doped Quantum Dots in Photoelectrochemical Cells

Author(s): Dong, Yitong, Rossi, Daniel, Parobek, David and Son, Dong Hee

Published: 2016

Web link: http://onlinelibrary.wiley.com/doi/10.1002/cphc.201501142/full

Plasma Enhanced Atomic Layer Deposition of SiN-AlN Composites for Ultra Low Wet Etch Rates in Hydrofluoric Acid

Author(s): Kim, Yongmin: Provine, J.: Walch, Stephen P: Park, Joonsuk: Phuthong, Witchukorn: Dadlani, Anup Lal: Kim, Hyo Jin: Schindler, Peter: Kim, Kihyun: Prinz, Fritz B

Published: 2016

Web link: http://pubs.acs.org/doi/abs/10.1021/acsami.6b03194

Microscale Characterization of Surface Recombination at the Vicinity of Laser-Processed Regions in c-Si Solar Cells

Author(s): Roige, A, Osso?, J O, Martin, I, Voz, C, Ortega, P, Lopez-Gonzalez, J M, Alcubilla, R and Vega, L F

Published: 2016

Web link: http://ieeexplore.ieee.org/lpdocs/epic03/wrapper.htm?arnumber=7389963

High frequency reciprocating sliding wear behavior and mechanisms of quaternary metal oxide coatings

Author(s): Ageh, V, Choudhuri, D and Scharf, T. W.

Published: 2015

Web link: http://linkinghub.elsevier.com/retrieve/pii/S0043164815001465

Atomic layer deposition of NiO hole-transporting layers for polymer solar cells

Author(s): Hsu, Che-Chen, Su, Heng-Wei, Hou, Cheng-Hung, Shyue, Jing-Jong and Tsai, Feng-Yu

Published: 2015

Web link: http://iopscience.iop.org/article/10.1088/0957-4484/26/38/385201

Low?temperature hollow cathode plasma?assisted atomic layer deposition of crystalline III?nitride thin films and nanostructures

Author(s): Ozgit-Akgun, Cagla: Goldenberg, Eda: Bolat, Sami: Tekcan, Burak: Kayaci, Fatma: Uyar, Tamer: Okyay, Ali Kemal: Biyikli, Necmi

Published: 2015

Web link: http://doi.wiley.com/10.1002/pssc.201400167

Sorting Semiconducting Single?Walled Carbon Nanotubes by Water?Soluble Polyfluorene Assisted Electrophoresis and Its Application in Field?effect Transistors

Author(s): Zhu, Haoyun and Wang, Weizhi

Published: 2015

Web link: http://doi.wiley.com/10.1002/cjoc.201500287

Minority-carrier lifetime and defect content of n-type silicon grown by the noncontact crucible method

Author(s): Kivambe, Maulid, Powell, Douglas M, Castellanos, Sergio, Ann Jensen, Mallory, Morishige, Ashley E, Nakajima, Kazuo, Morishita, Kohei, Murai, Ryota and Buonassisi, Tonio

Published: 2014

Web link: http://linkinghub.elsevier.com/retrieve/pii/S0022024814005971