参考文献

Veeco CNT ALD customers are at the leading edge of ALD research around the world resulting in more publications than on any other commercial ALD platforms.

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Author(s): Yang, Zheng, Ko, Changhyun, Balakrishnan, Viswanath, Gopalakrishnan, Gokul and Ramanathan, Shriram

Published: 2010

Web link: http://link.aps.org/doi/10.1103/PhysRevB.82.205101

Author(s): Lee, Seung-Mo, Grass, Gregor, Kim, Gyeong-Man, Dresbach, Christian, Zhang, Lianbing, Go?sele, Ulrich and Knez, Mato

Published: 2009

Web link: http://pubs.rsc.org/en/content/articlehtml/2009/cp/b820436e

Author(s): Wang, Yujin, Jin, Aizi, Quan, Baogang, Liu, Zhe, Li, Yunlong, Xia, Xiaoxiang, Li, Wuxia, Yang, Haifang, Gu, Changzhi and Li, Junjie

Published: 2017

Web link: http://linkinghub.elsevier.com/retrieve/pii/S0167931717300333

Author(s): Kumar, Suhas: Wang, Ziwen: Huang, Xiaopeng: Kumari, Niru: Davila, Noraica: Strachan, John Paul: Vine, David: Kilcoyne, A L David: Nishi, Yoshio: Williams, R Stanley

Published: 2016

Web link: http://pubs.acs.org/doi/abs/10.1021/acsnano.6b06275

Author(s): F�brega, C, Murcia-L�pez, S, Monllor-Satoca, D, Prades, J D, Hern�ndez-Alonso, M D, Penelas, G, Morante, J R and Andreu, T

Published: 2016

Web link: http://linkinghub.elsevier.com/retrieve/pii/S0926337316301448

Author(s): Jensen, Mallory Ann, Hofstetter, Jasmin, Morishige, Ashley E, Coletti, Gianluca, Lai, Barry, Fenning, David P and Buonassisi, Tonio

Published: 2015

Web link: http://scitation.aip.org/content/aip/journal/apl/106/20/10.1063/1.4921619

Author(s): Altuntas, Halit: Ozgit-Akgun, Cagla: Donmez, Inci: Biyikli, Necmi

Published: 2015

Web link: http://scitation.aip.org/content/aip/journal/jap/117/15/10.1063/1.4917567