参考文献

Veeco CNT ALD customers are at the leading edge of ALD research around the world resulting in more publications than on any other commercial ALD platforms.

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Author(s): Schie�l, Stefan P, Gannott, Florentina, Etschel, Sebastian H, Schweiger, Manuel, Gr�nler, Saeideh, Halik, Marcus and Zaumseil, Jana

Published: 2016

Web link: http://onlinelibrary.wiley.com/doi/10.1002/admi.201600215/full

Author(s): Poncelet, O: Tallier, G: Simonis, P.: Cornet, A: Francis, L. A.

Published: 2015

Web link: http://iopscience.iop.org/1748-3190/10/2/026004/article/

Author(s): Avila, Jason R, DeMarco, Erica J, Emery, Jonathan D, Farha, Omar K, Pellin, Michael J, Hupp, Joseph T and Martinson, Alex B F

Published: 2014

Web link: http://pubs.acs.org/doi/abs/10.1021/am503008j

Author(s): Everaerts, Ken, Zeng, Li, Hennek, Jonathan W, Camacho, Diana I, Jariwala, Deep, Bedzyk, Michael J, Hersam, Mark C and Marks, Tobin J

Published: 2013

Web link: http://pubs.acs.org/doi/abs/10.1021/am403585n

Author(s): Nepal, Neeraj: Wheeler, Virginia D: Anderson, Travis J: Kub, Francis J: Mastro, Michael A: Myers-Ward, Rachael L: Qadri, Syed B: Freitas, Jaime A: Hernandez, Sandra C: Nyakiti, Luke O: Walton, Scott G: Gaskill, Kurt: Charles R Eddy, Jr

Published: 2013

Web link: http://iopscience.iop.org/article/10.7567/APEX.6.061003