参考文献

Veeco CNT ALD customers are at the leading edge of ALD research around the world resulting in more publications than on any other commercial ALD platforms.

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Author(s): Donmez, Inci, Kayaci, Fatma, Ozgit-Akgun, Cagla, Uyar, Tamer and Biyikli, Necmi

Published: 2013

Web link: http://linkinghub.elsevier.com/retrieve/pii/S0925838813001102

Author(s): Nepal, N: Qadri, S B: Hite, J K: Mahadik, N A: Mastro, M A: Eddy Jr, C R

Published: 2013

Web link: http://scitation.aip.org/content/aip/journal/apl/103/8/10.1063/1.4818792

Author(s): Sutherland, Brandon R, Hoogland, Sjoerd, Adachi, Michael M, Kanjanaboos, Pongsakorn, Wong, Chris T O, McDowell, Jeffrey J, Xu, Jixian, Voznyy, Oleksandr, Ning, Zhijun, Houtepen, Arjan J and Sargent, Edward H

Published: 2014

Web link: http://doi.wiley.com/10.1002/adma.201403965

Author(s): You, Han and Steckl, Andrew J

Published: 2013

Web link: http://doi.wiley.com/10.1002/jsid.169

Author(s): Persson, Henrik, Beech, Jason P, Samuelson, Lars, Oredsson, Stina, Prinz, Christelle N and Tegenfeldt, Jonas O

Published: 2012

Web link: http://www.springerlink.com/index/10.1007/s12274-012-0199-0

Author(s): Kotha, R, Elam, D, Hoy, J and Collins, G

Published: 2010

Web link: http://ascelibrary.org/doi/pdf/10.1061/41096(366)329