Veeco 推出 GENxplor 分子束外延系统
Product News | Aug 19, 2013
Industry’s First Fully-Integrated MBE System for the Compound Semiconductor R&D Market
PLAINVIEW, N.Y.–(BUSINESS WIRE)–Aug. 19, 2013– Veeco Instruments Inc. (NASDAQ: VECO) today introduced the GENxplor™ Molecular Beam Epitaxy (MBE) Deposition System , the industry’s first fully-integrated MBE system for the compound semiconductor R&D market. GENxplor 在基底上实现了直径高达 3 英寸的高品质外延层，非常适合对各种材料进行尖端研究，其中包括砷化镓、氮化物和氧化物。
Veeco’s New GENxplor R&D MBE System (Photo: Business Wire)
“The compound semiconductor R&D community asked for a more affordable, flexible, and easy-to-use MBE system and Veeco has delivered with the GENxplor,” commented Jim Northup, Veeco’s Vice President and General Manager. “We have repackaged Veeco’s industry-leading MBE technology into a novel ‘all-in-one’ design that combines the reactor and electronics on a single frame. It will change the way researchers use MBE.”
The GENxplor uses Veeco’s proven GEN10™ growth chamber design and features unmatched process flexibility, ideal for materials research on emerging technologies such as UV LEDs, high-efficiency solar cells, and high-temperature superconductors. 其高效的单帧设计将所有真空硬件与车载电子器件相结合，比其他 MBE 系统小 40%，可有效节省宝贵的实验室空间。由于手动系统被集成在一个单一框架中，因此可减少安装时间。The open architecture design of the GENxplor also improves ease-of-use, provides convenient access to effusion cells, and allows easier serviceability when compared to other MBE systems. 与 Veeco 近期推出的可伸缩源结合使用时，GENxplor 系统堪称氧化物材料研究领域最先进的系统。
In recognition of the growing influence and importance of China in the field of MBE research, Veeco is launching the GENxplor at this week’s China MBE Conference in Shanghai. For more information on the GENxplor, please visit us at the China MBE Conference or go to www.veeco.com/genxplor .
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To the extent that this news release discusses expectations or otherwise makes statements about the future, such statements are forward-looking and are subject to a number of risks and uncertainties that could cause actual results to differ materially from the statements made. These factors include the risks discussed in the Business Description and Management’s Discussion and Analysis sections of Veeco’s Annual Report on Form 10-K for the year ended December 31, 2011 and in our subsequent quarterly reports on Form 10-Q, current reports on Form 8-K and press releases. Veeco does not undertake any obligation to update any forward-looking statements to reflect future events or circumstances after the date of such statements.
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Source: Veeco Instruments Inc.
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