Author(s): Xu, Qiang, Yang, Yang, Yang, Jie, Wang, Xiaozu, Wang, Zhaohui and Wang, Yong
Published: 2013
Web link: http://linkinghub.elsevier.com/retrieve/pii/S0376738813003608
Atomic Layer Deposition of MnS: Phase Control and Electrochemical Applications
Author(s): Riha, Shannon C, Koegel, Alexandra A, Meng, Xiangbo, Kim, In Soo, Cao, Yanqiang, Pellin, Michael J, Elam, Jeffrey W and Martinson, Alex B F
Published: 2016
A novel thermally-stable zirconium amidinate ALD precursor for ZrO2 thin films
Author(s): Lee, B, Choi, K J, Hande, A, Kim, M J, Wallace, R M, Kim, J, Senzaki, Y, Shenai, D, Li, H, Rousseau, M and Suydam, J
Published: 2009
Effect of the blistering of ALD Al
Author(s): Acero, M C, Beldarrain, O, Duch, M, Zabala, M, Gonzalez, M B and Campabadal, F
Published: 2015
Web link: http://ieeexplore.ieee.org/lpdocs/epic03/wrapper.htm?arnumber=7087443
Vapor-Phase Metalation by Atomic Layer Deposition in a Metal?Organic Framework
Author(s): Mondloch, Joseph E, Bury, Wojciech, Fairen-Jimenez, David, Kwon, Stephanie, DeMarco, Erica J, Weston, Mitchell H, Sarjeant, Amy A, Nguyen, SonBinh T, Stair, Peter C, Snurr, Randall Q, Farha, Omar K and Hupp, Joseph T
Published: 2013
Author(s): Kim, Hyungchul, Singh, Ankit Kumar, Wang, Cheng-Yin, Fuentes-Hernandez, Canek, Kippelen, Bernard and Graham, Samuel
Published: 2016
Web link: http://scitation.aip.org/content/aip/journal/rsi/87/3/10.1063/1.4942510
Electrical resistivity of Ti?Zn mixed oxide thin films deposited by atomic layer deposition
Author(s): Hazra, S K, Borgese, L, Federici, S, Bontempi, E and Ferrari, M
Published: 2012
Web link: http://www.sciencedirect.com/science/article/pii/S0040609012004282
Author(s): Lee, B, Park, T. J., Hande, A, Kim, M J and Wallace, R M
Published: 2009
Web link: http://www.sciencedirect.com/science/article/pii/S0167931709002238