参考文献

Veeco CNT ALD customers are at the leading edge of ALD research around the world resulting in more publications than on any other commercial ALD platforms.

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Author(s): Zhang, Jin, Coll, Mariona, Puig, Teresa, Pellicer, Eva and Sort, Jordi

Published: 2016

Web link: http://pubs.rsc.org/en/content/articlehtml/2016/tc/c6tc02656g

Author(s): Kim, N, Potscavage, W J, Domercq, B, Kippelen, B and Graham, S

Published: 2009

Web link: http://link.aip.org/link/APPLAB/v94/i16/p163308/s1&Agg=doi

Author(s): Katz, Michael J, DeVries Vermeer, Michael J, Farha, Omar K, Pellin, Michael J and Hupp, Joseph T

Published: 2014

Web link: http://pubs.acs.org/doi/abs/10.1021/jp506083a

Author(s): Smith, S W, Kitahara, A R, Rodriguez, M A, Henry, M D, Brumbach, M T and Ihlefeld, J F

Published: 2017

Web link: http://aip.scitation.org/doi/10.1063/1.4976519

Author(s): Zhang, Di, Zhang, Lei, Lee, Daeyeon, Cheng, Xuemei and Feng, Gang

Published: 2015

Web link: http://linkinghub.elsevier.com/retrieve/pii/S0921509315004682