参考文献

Veeco CNT ALD customers are at the leading edge of ALD research around the world resulting in more publications than on any other commercial ALD platforms.

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Author(s): Kim, J B, Fuentes-Hernandez, C, Hwang, D K, Potscavage Jr, W J, Cheun, H and Kippelen, B

Published: 2011

Web link: http://linkinghub.elsevier.com/retrieve/pii/S156611991000337X

Author(s): Karaduman, Irmak, Barin, �zlem and Acar, Selim

Published: 2016

Web link: http://link.springer.com/10.3938/jkps.68.1334

Author(s): Greenberg, Benjamin L, Ganguly, Shreyashi, Held, Jacob T, Kramer, Nicolaas J, Mkhoyan, K Andre, Aydil, Eray S and Kortshagen, Uwe R

Published: 2015

Web link: http://pubs.acs.org/doi/10.1021/acs.nanolett.5b03600

Author(s): Chicot, G, Mare?chal, A, Motte, R, Muret, P, Gheeraert, E and Pernot, J

Published: 2013

Web link: http://link.aip.org/link/APPLAB/v102/i24/p242108/s1&Agg=doi

Author(s): Vogel, E, Sonnet, A, Galatage, R and Milojevic, M

Published: 2010

Web link: http://ecst.ecsdl.org/content/28/1/209.short