参考文献

Veeco CNT ALD customers are at the leading edge of ALD research around the world resulting in more publications than on any other commercial ALD platforms.

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Author(s): Chien, Jui-Fen: Liao, Hua-Yang: Yu, Sheng-Fu: Lin, Ray-Ming: Shiojiri, Makoto: Shyue, Jing-Jong: Chen, Miin-Jang

Published: 2013

Web link: http://pubs.acs.org/doi/abs/10.1021/am301799j

Author(s): Sharma, Ravikant, Bufon, Carlos C�sar Bof, Grimm, Daniel, Sommer, Robert, Wollatz, Arndt, Schadewald, J�rg, Thurmer, Dominic J, Siles, Pablo F, Bauer, Martin and Schmidt, Oliver G

Published: 2014

Web link: http://doi.wiley.com/10.1002/aenm.201301631

Author(s): Wachnicki, ?, Krajewski, T, ?uka, G, Witkowski, B, Kowalski, B, Kopalko, K, Domagala, J Z, Guziewicz, M, Godlewski, M and Guziewicz, E

Published: 2010

Web link: http://dx.doi.org/10.1016/j.tsf.2009.12.030

Author(s): Krajewski, T, Guziewicz, E, Godlewski, M, Wachnicki, L, Kowalik, I A, Wojcik-Glodowska, A, Lukasiewicz, M, Kopalko, K, Osinniy, V and Guziewicz, M

Published: 2009

Web link: http://linkinghub.elsevier.com/retrieve/pii/S0026269208003996

Author(s): Rahman, Atikur, Majewski, Pawel W, Doerk, Gregory, Black, Charles T and Yager, Kevin G

Published: 2016

Web link: http://www.nature.com/doifinder/10.1038/ncomms13988

Author(s): Zhang, Fangyu, Shen, Qingchen, Shi, Xindong, Li, Shipu, Wang, Wanlin, Luo, Zhen, He, Gufeng, Zhang, Peng, Tao, Peng, Song, Chengyi, Zhang, Wang, Zhang, Di, Deng, Tao and Shang, Wen

Published: 2015

Web link: http://onlinelibrary.wiley.com/doi/10.1002/adma.201404534/full

Author(s): Guziewicz, E, Godlewski, M, Wachnicki, L, Krajewski, T A, Luka, G, Gieraltowska, S, Jakiela, R, Stonert, A, Lisowski, W, Krawczyk, M, Sobczak, J W and Jablonski, A

Published: 2012

Web link: http://stacks.iop.org/0268-1242/27/i=7/a=074011?key=crossref.7929bd1088d74cdc160fcfdd28feb858

Author(s): Dominik, M, Le?niewski, A, Janczuk, M, Niedzi�?ka-J�nsson, J, Ho?dy?ski, M, Wachnicki, ?, Godlewski, M, Bock, W J and Smietana, M

Published: 2016

Web link: http://linkinghub.elsevier.com/retrieve/pii/S0956566316309642