参考文献

Veeco CNT ALD customers are at the leading edge of ALD research around the world resulting in more publications than on any other commercial ALD platforms.

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Author(s): Jandhyala, Srikar, Mordi, Greg, Lee, Bongki, Lee, Geunsik, Floresca, Carlo, Cha, Pil-Ryung, Ahn, Jinho, Wallace, Robert M, Chabal, Yves J, Kim, Moon J, Colombo, Luigi, Cho, Kyeongjae and Kim, Jiyoung

Published: 2012

Web link: http://pubs.acs.org/doi/abs/10.1021/nn300167t

Author(s): Li, Tina C, Fabregat-Santiago, Francisco, Farha, Omar K, Spokoyny, Alexander M, Raga, Sonia R, Bisquert, Juan, Mirkin, Chad A, Marks, Tobin J and Hupp, Joseph T

Published: 2011

Web link: http://pubs.acs.org/doi/abs/10.1021/jp112139h

Author(s): Lamagna, L, Fusi, M, Spiga, S., Fanciulli, M., Brammertz, G, Merckling, C, Meuris, M and Molle, A.

Published: 2010

Web link: http://dx.doi.org/10.1016/j.mee.2010.10.035

Author(s): Kim, D S, Lee, S M, Scholz, R, Knez, M, G�sele, U, Fallert, J, Kalt, H and Zacharias, M

Published: 2008

Web link: http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=4834519

Author(s): Lim, Jae-Hong, Phiboolsirichit, Nopparat, Mubeen, Syed, Rheem, Youngwoo, Deshusses, Marc A, Mulchandani, Ashok and Myung, Nosang V

Published: 2009

Web link: http://doi.wiley.com/10.1002/elan.200900314

Author(s): Witkowski, B S, Pietruszka, R, Gieraltowska, S, Wachnicki, L, Przybylinska, H and Godlewski, M

Published: 2017

Web link: http://linkinghub.elsevier.com/retrieve/pii/S1230340217300045