参考文献

Veeco CNT ALD customers are at the leading edge of ALD research around the world resulting in more publications than on any other commercial ALD platforms.

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Author(s): Lan, Yucheng, Wang, Hui, Wang, Dezhi, Gang, Chen and Ren, Zhifeng

Published: 2010

Web link: http://www.hindawi.com/journals/jnt/2010/279608/abs/

Author(s): Zhou, Yinhua, Cheun, Hyeunseok, Potscavage Jr, Willliam J, Fuentes-Hernandez, Canek, Kim, Sung-Jin and Kippelen, Bernard

Published: 2010

Web link: http://xlink.rsc.org/?DOI=c0jm00662a

Author(s): Xie, Jin, Sendek, Austin D, Cubuk, Ekin D, Zhang, Xiaokun, Lu, Zhiyi, Gong, Yongji, Wu, Tong, Shi, Feifei, Liu, Wei and Reed, Evan J

Published: 2017

Web link:

Author(s): Cervantes-L�pez, J L, Rangel, R, Espino, J, Marti?nez, E, Garc�a-Guti�rrez, R, Bartolo-P�rez, P, Alvarado-Gil, J J and Contreras, O E

Published: 2017

Web link: http://link.springer.com/article/10.1007/s00339-016-0722-3