参考文献

Veeco CNT ALD customers are at the leading edge of ALD research around the world resulting in more publications than on any other commercial ALD platforms.

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Author(s): Barr, Ma�ssa K S: Assaud, Lo�c: Wu, Yanlin: Laffon, Carine: Parent, Philippe: Bachmann, Julien: Santinacci, Lionel

Published: 2015

Web link: http://linkinghub.elsevier.com/retrieve/pii/S0013468615300839

Author(s): Riaz, Adnan, Pyatkov, Feliks, Alam, Asiful, Dehm, Simone, Felten, Alexandre, Chakravadhanula, Venkata S K, Flavel, Benjamin S, K�bel, Christian, Lemmer, Uli and Krupke, Ralph

Published: 2015

Web link: http://iopscience.iop.org/article/10.1088/0957-4484/26/32/325202

Author(s): Persson, O, Lind, E, Lundgren, E, Rubio-Zuazo, J, Castro, G R, Wernersson, L E, Mikkelsen, A and Timm, R

Published: 2013

Web link: http://link.aip.org/link/AAIDBI/v3/i7/p072131/s1&Agg=doi

Author(s): Galatage, R V, Dong, H., Zhernokletov, D. M., Brennan, B, Hinkle, C L, Wallace, R M and Vogel, E M

Published: 2013

Web link: http://link.aip.org/link/APPLAB/v102/i13/p132903/s1&Agg=doi