参考文献

Veeco CNT ALD customers are at the leading edge of ALD research around the world resulting in more publications than on any other commercial ALD platforms.

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Author(s): Alexewicz, A, Ostermaier, C, Henkel, C, Bethge, O, Carlin, J F, Lugani, L, Grandjean, N, Bertagnolli, E, Pogany, D and Strasser, G

Published: 2012

Web link: http://linkinghub.elsevier.com/retrieve/pii/S0040609012006748

Author(s): Wiemer, C., Lamperti, A, Lamagna, L, Salicio, O, Molle, A. and Fanciulli, M.

Published: 2011

Web link: http://jes.ecsdl.org/content/158/8/G194.full

Author(s): Zolotaryov, Andriy, Goetze, Silvana, Bachmann, Julien, Goerlitz, Detlef, Hesse, Dietrich and Nielsch, Kornelius

Published: 2010

Web link: http://doi.wiley.com/10.1002/adem.201000271

Author(s): Xu, Alexander Minyi, Wang, Derek Schawn, Shieh, Peyton, Cao, Yuhong and Melosh, Nick

Published: 2017

Web link: http://doi.wiley.com/10.1002/cbic.201600689

Author(s): Chai, Yu, Su, Shanshan, Yan, Dong, Ozkan, Mihrimah, Lake, Roger and Ozkan, Cengiz S

Published: 2017

Web link: http://www.nature.com/srep/2017/170210/srep41593/full/srep41593.html

Author(s): Frascaroli, Jacopo, Cianci, Elena, Spiga, Sabina, Seguini, Gabriele and Perego, Michele

Published: 2016

Web link: http://pubs.acs.org/doi/abs/10.1021/acsami.6b11340