参考文献

Veeco CNT ALD customers are at the leading edge of ALD research around the world resulting in more publications than on any other commercial ALD platforms.

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Author(s): Ratajczak, R, Stonert, A, Guziewicz, E and Giera?towska, S

Published: 2012

Web link:

Author(s): Alkis, Sabri, Oruc, Feyza B, Orta�, B�lend, Ko?ger, A Cahit and Okyay, Ali K

Published: 2012

Web link: http://iopscience.iop.org/article/10.1088/2040-8978/14/12/125001

Author(s): Wiemer, Claudia, Lamperti, Alessio, Lamagna, Luca, Salicio, Olivier, Molle, Alessandro and Fanciulli, Marco

Published: 2011

Web link: http://ecst.ecsdl.org/cgi/doi/10.1149/1.3569939

Author(s): Lee, B, Mordi, G, Kim, M J, Chabal, Y J, Vogel, E M, Wallace, R M, Cho, K J, Colombo, L and Kim, J

Published: 2010

Web link: http://link.aip.org/link/APPLAB/v97/i4/p043107/s1&Agg=doi

Author(s): Zolotaryov, Andriy, Goetze, Silvana, Zierold, Robert, Novikov, Dmitri, Birajdar, Balaji, Hesse, Dietrich and Nielsch, Kornelius

Published: 2010

Web link: http://doi.wiley.com/10.1002/adem.201000043

Author(s): Meyer, J, Schneidenbach, D, Winkler, T, Hamwi, S, Weimann, T, Hinze, P, Ammermann, S, Johannes, H-H, Riedl, T and Kowalsky, W

Published: 2009

Web link: http://scitation.aip.org/content/aip/journal/apl/94/23/10.1063/1.3153123