参考文献

Veeco CNT ALD customers are at the leading edge of ALD research around the world resulting in more publications than on any other commercial ALD platforms.

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Author(s): Zolotaryov, Andriy, Goetze, Silvana, Zierold, Robert, Novikov, Dmitri, Birajdar, Balaji, Hesse, Dietrich and Nielsch, Kornelius

Published: 2010

Web link: http://doi.wiley.com/10.1002/adem.201000043

Author(s): Meyer, Jens, G�rrn, Patrick, Bertram, Franz, Hamwi, Sami, Winkler, Thomas, Johannes, Hans-Hermann, Weimann, Thomas, Hinze, Peter, Riedl, Thomas and Kowalsky, Wolfgang

Published: 2009

Web link: http://doi.wiley.com/10.1002/adma.200803440

Author(s): Coppo, Rodolfo L, Farnum, Byron H, Sherman, Benjamin D, Iha, Neyde Y Murakami and Meyer, Thomas J

Published: 2017

Web link: http://pubs.rsc.org/en/content/articlehtml/2017/se/c6se00022c

Author(s): Zhang, Xiwei, Mao, Jie, Shao, Zhibin, Diao, Senlin, Hu, Dan, Tang, Zhenjie, Wu, Hai-Hua and Jie, Jiansheng

Published: 2017

Web link: http://pubs.rsc.org/en/content/articlehtml/2017/tc/c6tc04960e

Author(s): Gamage, Sampath, Li, Zhen, Yakovlev, Vladislav S, Lewis, Colin, Wang, Han, Cronin, Stephen B and Abate, Yohannes

Published: 2016

Web link: http://onlinelibrary.wiley.com/doi/10.1002/admi.201600121/full

Author(s): Serry, Mohamed, Sharaf, AbdelHameed, Emira, Ahmed, Abdul-Wahed, Ahmed and Gamal, Asmaa

Published: 2015

Web link: http://linkinghub.elsevier.com/retrieve/pii/S0924424715002502

Author(s): Bilo, Fabjola, Borgese, Laura, Prost, Josef, Rauwolf, Mirjam, Turyanskaya, Anna, Wobrauschek, Peter, Kregsamer, Peter, Streli, Christina, Pazzaglia, Ugo and Depero, Laura E

Published: 2015

Web link: http://linkinghub.elsevier.com/retrieve/pii/S016943321502379X