参考文献

Veeco CNT ALD customers are at the leading edge of ALD research around the world resulting in more publications than on any other commercial ALD platforms.

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Author(s): Chan, Catherine E, Abbott, Malcolm D, Juhl, Mattias K, Hallam, Brett J, Xiao, Bo and Wenham, Stuart R

Published: 2014

Web link: http://ieeexplore.ieee.org/lpdocs/epic03/wrapper.htm?arnumber=6623080

Author(s): Li, Jingqi, Wang, Qingxiao, Yue, Weisheng, Guo, Zaibing, Li, Liang, Zhao, Chao, Wang, Xianbin, Abutaha, Anas I, Alshareef, H N, Zhang, Yafei and Zhang, X X

Published: 2014

Web link: http://xlink.rsc.org/?DOI=c4nr00978a

Author(s): Garc�a, H�ctor, Cast�n, Helena, Due�as, Salvador, Bail�n, Luis, Campabadal, Francesca, Beldarrain, Oihane, Zabala, Miguel, Gonzalez, Mireia Bargallo and Rafi, Joan Marc

Published: 2013

Web link: http://link.aip.org/link/JVTAD6/v31/i1/p01A127/s1&Agg=doi