参考文献

Veeco CNT ALD customers are at the leading edge of ALD research around the world resulting in more publications than on any other commercial ALD platforms.

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Author(s): Bok, S, Pathan, S, Wood, A J, Chen, B, Mathai, C J, Gangopadhyay, K, Grant, S, McArthur, C and Gangopadhyay, S

Published: 2015

Web link: http://ieeexplore.ieee.org/lpdocs/epic03/wrapper.htm?arnumber=7181239

Author(s): Ren, J G, Wu, Q H, Hong, G, Zhang, W J and Wu, H.

Published: 2013

Web link: http://onlinelibrary.wiley.com/doi/10.1002/ente.201200038/full

Author(s): Gieraltowska, Sylwia, Wachnicki, Lukasz, Witkowski, Bartlomiej S, Guziewicz, El?bieta and Godlewski, Marek

Published: 2013

Web link: http://doi.wiley.com/10.1002/cvde.201207029

Author(s): Klahr, Benjamin, Gimenez, Sixto, Fabregat-Santiago, Francisco, Bisquert, Juan and Hamann, Thomas W

Published: 2012

Web link: http://pubs.rsc.org/en/Content/ArticleHTML/2012/EE/C2EE21414H