参考文献

Veeco CNT ALD customers are at the leading edge of ALD research around the world resulting in more publications than on any other commercial ALD platforms.

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Author(s): Yum, J H, Akyol, T, Lei, M, Ferrer, D A, Hudnall, Todd W, Downer, M, Bielawski, C W, Bersuker, G, Lee, J C and Banerjee, S K

Published: 2011

Web link: http://linkinghub.elsevier.com/retrieve/pii/S0022024811007238

Author(s): Lind, Erik, Niquet, Yann-Michel, Mera, Hector and Wernersson, Lars-Erik

Published: 2010

Web link: http://link.aip.org/link/APPLAB/v96/i23/p233507/s1&Agg=doi

Author(s): Mei, Yongfeng, Huang, Gaoshan, Solovev, Alexander A, Ure�a, Esteban Berm�dez, M�nch, Ingolf, Ding, Fei, Reindl, Thomas, Fu, Ricky K Y, Chu, Paul K and Schmidt, Oliver G

Published: 2008

Web link: http://doi.wiley.com/10.1002/adma.200801589

Author(s): Abermann, S, Henkel, C, Bethge, O, Straif, C J, Hutter, H and Bertagnolli, E

Published: 2009

Web link: http://jes.ecsdl.org/cgi/doi/10.1149/1.3095475

Author(s): Molle, Alessandro, Brammertz, Guy, Lamagna, Luca, Fanciulli, Marco, Meuris, Marc and Spiga, Sabina

Published: 2009

Web link: http://scitation.aip.org/content/aip/journal/apl/95/2/10.1063/1.3182734

Author(s): Zhuiykov, Serge, Hyde, Lachlan, Hai, Zhenyin, Akbari, Mohammad Karbalaei, Kats, Eugene, Detavernier, Christophe, Xue, Chenyang and Xu, Hongyan

Published: 2017

Web link: http://linkinghub.elsevier.com/retrieve/pii/S235294071630230X