参考文献

Veeco CNT ALD customers are at the leading edge of ALD research around the world resulting in more publications than on any other commercial ALD platforms.

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Author(s): Meng, Xiangbo, Geng, Dongsheng, Liu, Jian, Li, Ruying and Sun, Xueliang

Published: 2011

Web link: http://iopscience.iop.org/article/10.1088/0957-4484/22/16/165602

Author(s): Abermann, S, Pozzovivo, G, Kuzmik, J, Ostermaier, C, Henkel, C, Bethge, O, Strasser, G, Pogany, D, Carlin, J F, Grandjean, N and Bertagnolli, E

Published: 2009

Web link: http://link.aip.org/link/ELLEAK/v45/i11/p570/s1&Agg=doi

Author(s): Olmedo, Mario, Martinez-Morales, Alfredo A, Liu, Gang, Yengel, Emre, Ozkan, Cengiz S, Lau, Chun Ning, Ozkan, Mihrimah and Liu, Jianlin

Published: 2009

Web link: http://link.aip.org/link/APPLAB/v94/i12/p123109/s1&Agg=doi

Author(s): Ahn, Sol, Thornburg, Nicholas E, Li, Zhanyong, Wang, Timothy C, Gallington, Leighanne C, Chapman, Karena W, Notestein, Justin M, Hupp, Joseph T and Farha, Omar K

Published: 2016

Web link: http://pubs.acs.org/doi/abs/10.1021/acs.inorgchem.6b02103

Author(s): Hassan, Mehwish, Borgese, Laura, Montesanti, Giuditta, Bemporad, Edoardo, Cesarini, Gianmario, Li Voti, Roberto and Depero, Laura E

Published: 2017

Web link: http://linkinghub.elsevier.com/retrieve/pii/S0040609016307994