参考文献

Veeco CNT ALD customers are at the leading edge of ALD research around the world resulting in more publications than on any other commercial ALD platforms.

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Author(s): Kment, S: Hubicka, Z: Krysa, J: Sekora, D: Zlamal, M: Olejnicek, J: Cada, M: Ksirova, P: Remes, Z: Schmuki, P: Schubert, E.: Zboril, R

Published: 2015

Web link: http://linkinghub.elsevier.com/retrieve/pii/S0926337314006286

Author(s): Sutherland, Brandon R, Johnston, Andrew K, Ip, Alexander H, Xu, Jixian, Adinolfi, Valerio, Kanjanaboos, Pongsakorn and Sargent, Edward H

Published: 2015

Web link: http://pubs.acs.org/doi/abs/10.1021/acsphotonics.5b00164

Author(s): Chen, Xiaoshu, Park, Hyeong-Ryeol, Lindquist, Nathan C, Shaver, Jonah, Pelton, Matthew and Oh, Sang-Hyun

Published: 2014

Web link: http://www.nature.com/doifinder/10.1038/srep06722

Author(s): Bulusu, Anuradha: Graham, Samuel: Bahre, Hendrik: Behm, Henrik: B�ke, Marc: Dahlmann, Rainer: Hopmann, Christian: Winter, J�rg

Published: 2015

Web link: http://onlinelibrary.wiley.com/doi/10.1002/adem.201400431/full

Author(s): Sowa, Mark J: Yemane, Yonas: Zhang, Jinsong: Palmstrom, Johanna C: Ju, Ling: Strandwitz, Nicholas C: Prinz, Fritz B: Provine, J.

Published: 2016

Web link: http://avs.scitation.org/doi/10.1116/1.4972858

Author(s): Grande, P L, Vos, M, Venkatachalam, D K, Nandi, S K and Elliman, R G

Published: 2013

Web link: http://link.aip.org/link/APPLAB/v103/i7/p071911/s1&Agg=doi

Author(s): Riha, Shannon C, Jin, Shengye, Baryshev, Sergey V, Thimsen, Elijah, Wiederrecht, Gary P and Martinson, Alex B F

Published: 2013

Web link: http://pubs.acs.org/doi/abs/10.1021/am403225e

Author(s): Konda, R. B., Mundle, R., Bamiduro, O., Dondapati, H., Bahoura, M., Pradhan, A. K. and Donley, C

Published: 2012

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