参考文献

Veeco CNT ALD customers are at the leading edge of ALD research around the world resulting in more publications than on any other commercial ALD platforms.

Select the year of publication:

Optional - Enter a keyword or phrase to search for:

Author(s): Meyer, David J, Bass, Robert, Katzer, D Scott, Deen, David A, Binari, Steven C, Daniels, Kevin M and Eddy Jr, Charles R

Published: 2010

Web link: http://dx.doi.org/10.1016/j.sse.2010.05.024

Author(s): Tapily, Kandabara, Jakes, Joseph, Shrestha, Pragya R, Gu, Diefeng, Baumgart, H and Elmustafa, Abdelmageed

Published: 2008

Web link: http://ecst.ecsdl.org/cgi/doi/10.1149/1.2980002

Author(s): Qian, Lihua, Shen, Wen, Das, Biswajit, Shen, Bo and Qin, Gaowu W

Published: 2009

Web link: http://dx.doi.org/10.1016/j.cplett.2009.08.031

Author(s): Guo, Peijun, Weimer, Matthew S, Emery, Jonathan D, Diroll, Benjamin T, Chen, Xinqi, Hock, Adam S, Chang, Robert P H, Martinson, Alex B F and Schaller, Richard D

Published: 2016

Web link: http://pubs.acs.org/doi/abs/10.1021/acsnano.6b07042

Author(s): Huynh, Sa Hoang: Ha, Minh Thien Huu: Do, Huy Binh: Nguyen, Tuan Anh: Luc, Quang Ho: Chang, Edward Yi

Published: 2017

Web link: http://aip.scitation.org/doi/10.1063/1.4973998

Author(s): Liu, Jian, Wang, Biqiong, Sun, Qian, Li, Ruying, Sham, Tsun-Kong and Sun, Xueliang

Published: 2016

Web link: http://onlinelibrary.wiley.com/doi/10.1002/admi.201600468/full