参考文献

Veeco CNT ALD customers are at the leading edge of ALD research around the world resulting in more publications than on any other commercial ALD platforms.

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Author(s): Li, Fan, Wilker, Molly B and Stein, Andreas

Published: 2012

Web link: http://pubs.acs.org/doi/abs/10.1021/la300037q

Author(s): Cheun, Hyeunseok, Berrigan, John D, Zhou, Yinhua, Fenoll, Mathieu, Shim, Jaewon, Fuentes-Hernandez, Canek, Sandhage, Kenneth H and Kippelen, Bernard

Published: 2011

Web link: http://pubs.rsc.org/en/content/articlehtml/2011/ee/c1ee01316e

Author(s): Skarlatos, D, Bersani, M, Barozzi, M, Giubertoni, D, Vouroutzis, N Z and Ioannou-Sougleridis, V.

Published: 2012

Web link: http://jss.ecsdl.org/cgi/doi/10.1149/2.003301jss

Author(s): Nayfeh, Osama M: Chin, Matthew: Ervin, Matthew: Wilson, James: Ivanov, Tony: Proie, Robert: Nichols, Barbara M: Crowne, Frank: Kilpatrick, Stephen: Dubey, Madan: Nambaru, Raju: Ulrich, Marc

Published: 2011

Web link: http://oai.dtic.mil/oai/oai?verb=getRecord&metadataPrefix=html&identifier=ADA538063

Author(s): Alvarez-Quintana, J, Marti?nez, E, Perez-Tijerina, E., Pe?rez-Garci?a, S A and Rodri?guez-Viejo, J

Published: 2010

Web link: http://link.aip.org/link/JAPIAU/v107/i6/p063713/s1&Agg=doi