参考文献

Veeco CNT ALD customers are at the leading edge of ALD research around the world resulting in more publications than on any other commercial ALD platforms.

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Author(s): Chiba, D, Fukami, S, Shimamura, K, Ishiwata, N, Kobayashi, K and Ono, T

Published: 2011

Web link: http://www.nature.com/doifinder/10.1038/nmat3130

Author(s): M�nch, S, Reitzenstein, S, Borgstr�m, M, Thelander, C, Samuelson, L, Worschech, L and Forchel, A

Published: 2010

Web link: http://iopscience.iop.org/article/10.1088/0957-4484/21/10/105711

Author(s): Kaur, Jatinder, Bethge, Ole, Wibowo, Rachmat Adhi, Bansal, Neha, Bauch, Martin, Hamid, Raad, Bertagnolli, Emmerich and Dimopoulos, Theodoros

Published: 2017

Web link: http://linkinghub.elsevier.com/retrieve/pii/S0927024816305384

Author(s): Lard, Mercy, ten Siethoff, Lasse, Generosi, Johanna, Persson, Malin, Linke, Heiner and Mansson, Alf

Published: 2015

Web link: http://ieeexplore.ieee.org/lpdocs/epic03/wrapper.htm?arnumber=7066879

Author(s): Yang, Xiaogang, Liu, Rui, Du, Chun, Dai, Pengcheng, Zheng, Zhi and Wang, Dunwei

Published: 2014

Web link: http://pubs.acs.org/doi/abs/10.1021/am500948t