参考文献

Veeco CNT ALD customers are at the leading edge of ALD research around the world resulting in more publications than on any other commercial ALD platforms.

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Author(s): Schvartzman, Mark: Tsivion, David: Mahalu, Diana: Raslin, Olga: Joselevich, Ernesto

Published: 2013

Web link: http://www.pnas.org/content/110/38/15195.short

Author(s): O?Mahony, A: Monaghan, S.: Provenzano, G: Povey, I. M.: Nolan, M G: OConnor, E: Cherkaoui, K: Newcomb, S B: Crupi, F: Hurley, P K: Pemble, M E

Published: 2010

Web link: http://link.aip.org/link/APPLAB/v97/i5/p052904/s1&Agg=doi

Author(s): Chen, Dustin: Liang, Jiajie: Liu, Chao: Saldanha, Gillian: Zhao, Fangchao: Tong, Kwing: Liu, Jiang: Pei, Qibing

Published: 2015

Web link: http://onlinelibrary.wiley.com/doi/10.1002/adfm.201503236/full

Author(s): Bal?ytis, Armandas: Juodkazyt?, Jurga: Seniutinas, Gediminas: Li, Xijun: Niaura, Gediminas: Juodkazis, Saulius

Published: 2016

Web link: http://proceedings.spiedigitallibrary.org/proceeding.aspx?doi=10.1117/12.2218461

Author(s): Kazyak, Eric, Chen, Kuan-Hung, Wood, Kevin N, Davis, Andrew L, Thompson, Travis, Bielinski, Ashley R, Sanchez, Adrian J, Wang, Xiang, Wang, Chongmin, Sakamoto, Jeff and Dasgupta, Neil P

Published: 2017

Web link: http://pubs.acs.org/doi/abs/10.1021/acs.chemmater.7b00944