参考文献

Veeco CNT ALD customers are at the leading edge of ALD research around the world resulting in more publications than on any other commercial ALD platforms.

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Compact Alcohol Vapor Sensor based on Zinc Oxide Nano-coating Deposited by Atomic Layer Deposition method on Optical Fiber End-face

Author(s): Smietana, M, Grochowski, J and My?liwiec, M

Published: 2012

Web link: http://www.sciencedirect.com/science/article/pii/S1877705812044013

Low temperature atomic layer deposition of high-k dielectric stacks for scaled metal-oxide-semiconductor devices

Author(s): Bethge, Ole, Abermann, Stephan, Henkel, Christoph and Bertagnolli, Emmerich

Published: 2009

Web link: http://dx.doi.org/10.1016/j.tsf.2009.03.190

Nanoscale selective area atomic layer deposition of TiO2 using e-beam patterned polymers

Author(s): Haider, Ali, Yilmaz, Mehmet, Deminskyi, Petro, Eren, Hamit and Biyikli, Necmi

Published: 2016

Web link: http://pubs.rsc.org/en/content/articlehtml/2016/ra/c6ra23923d

Synthesis of multiferroic Er-Fe-O thin films by atomic layer and chemical vapor deposition

Author(s): Mantovan, R, Vangelista, S, Wiemer, C., Lamperti, A, Tallarida, G, Chikoidze, E, Dumont, Y and Fanciulli, M.

Published: 2014

Web link: http://scitation.aip.org/content/aip/journal/jap/115/17/10.1063/1.4865774

A Facile Fabrication of Fe3O4/ZnO Core-Shell Submicron Particles With Controlled Size

Author(s): Choi, Kyong-Hoon, Chae, Weon-Sik, Kim, Eun-Mee, Jun, Jong-Ho, Jung, Jong-Hyung, Kim, Yong-Rok and Jung, Jin-Seung

Published: 2011

Web link: http://ieeexplore.ieee.org/lpdocs/epic03/wrapper.htm?arnumber=6027686

Permeability and corrosion in ZrO2/Al2O3 nanolaminate and Al2O3 thin films grown by atomic layer deposition on polymers

Author(s): Carcia, Peter F., McLean, Robert S, Li, Zhigang G, Reilly, Michael H and Marshall, Will J

Published: 2012

Web link: http://link.aip.org/link/JVTAD6/v30/i4/p041515/s1&Agg=doi

Influence of Temperature on Evolution of Coaxial ZnO/Al2O3 One-Dimensional Heterostructures: From Core-Shell Nanowires to Spinel Nanotubes and Porous Nanowires

Author(s): Yang, Y., Kim, D S, Knez, M, Scholz, R, Berger, A, Pippel, E, Hesse, D, G�sele, U and Zacharias, M

Published: 2008

Web link: http://pubs.acs.org/cgi-bin/doilookup/?10.1021/jp710948j

Formation of a ZnO/ZnS interface passivation layer on (NH4) 2S treated In 0.53Ga0.47As: Electrical and in-situ X-ray photoelectron spectroscopy characterization

Author(s): Lucero, Antonio T, Byun, Young-Chul, Qin, Xiaoye, Cheng, Lanxia, Kim, Hyoungsub, Wallace, Robert M and Kim, Jiyoung

Published: 2016

Web link: http://stacks.iop.org/1347-4065/55/i=8S2/a=08PC02?key=crossref.efa806082cfb3a7f7a331d1723cd0e16

Atomically Flat Silicon Oxide Monolayer Generated by Remote Plasma

Author(s): Thian, Dickson: Yemane, Yonas T: Logar, Manca: Xu, Shicheng: Schindler, Peter: Winterkorn, Martin M: Provine, J.: Prinz, Fritz B

Published: 2016

Web link: http://pubs.acs.org/doi/abs/10.1021/acs.jpcc.6b00768

The Effects of Using ALD-Grown ZnO Buffer Layers on the Properties of Indium Tin Oxide Grown by Chemical Solution Deposition

Author(s): O'Brien, Shane: Povey, Ian M: Hamilton, Jeff A: Kingsley, Andrew: Thony, Philippe: Perraud, Simon: Pemble, Martyn E

Published: 2011

Web link: http://openurl.ingenta.com/content/xref?genre=article&issn=1533-4880&volume=11&issue=9&spage=8354