参考文献

Veeco CNT ALD customers are at the leading edge of ALD research around the world resulting in more publications than on any other commercial ALD platforms.

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Author(s): Ye, Gang, Hong, Wang, Geok Ng, Serene Lay, Ji, Rong, Arulkumaran, Subramaniam, Ng, Geok Ing, Li, Yang, Liu, Zhi Hong and Ang, Kian Siong

Published: 2014

Web link: http://scitation.aip.org/content/aip/journal/apl/105/15/10.1063/1.4898577

Author(s): Seger, Brian, Tilley, David S, Pedersen, Thomas, Vesborg, Peter C K, Hansen, Ole, Gr�tzel, Michael and Chorkendorff, Ib

Published: 2013

Web link: https://www.rsc.org/basket/shoppingcart/orderacknowledgment?uId=75d0bfc37e07d78b36592970d0c47180

Author(s): Old, C E, Smith, D M, Theater, D D and Campus, G T

Published: 2010

Web link: http://smartech.gatech.edu/handle/1853/34961

Author(s): Chen, Fengxiang, Liu, Xin, Yang, Huiyu, Dong, Binghai, Zhou, Yingshan, Chen, Dongzhi, Hu, Hang, Xiao, Xingfang, Fan, Difei, Zhang, Chunhua, Cheng, Fan, Cao, Yunhe, Yuan, Tian, Liang, Zihui, Li, Jing, Wang, Shimin and Xu, Weilin

Published: 2015

Web link: http://linkinghub.elsevier.com/retrieve/pii/S0169433215026057

Author(s): Aslan, Mustafa M, Webster, Nathan A, Byard, Courtney L, Pereira, Marcelo B, Hayes, Colin M, Wiederkehr, Rodrigo S and Mendes, Sergio B

Published: 2010

Web link: http://linkinghub.elsevier.com/retrieve/pii/S004060901000310X

Author(s): Vempati, Sesha, Kayaci-Senirmak, Fatma, Ozgit-Akgun, Cagla, Biyikli, Necmi and Uyar, Tamer

Published: 2015

Web link: http://pubs.acs.org/doi/10.1021/acs.jpcc.5b07904

Author(s): Li, Jingqi, Zhao, Chao, Wang, Qingxiao, Zhang, Qiang, Wang, Zhihong, Zhang, X X, Abutaha, A I and Alshareef, H N

Published: 2012

Web link: http://linkinghub.elsevier.com/retrieve/pii/S0008622312004794

Author(s): Barbos, Corina: Blanc-Pelissier, Dani�le: Fave, Alain: Blanquet, Elisabeth: Crisci, Alexandre: Lemiti, Mustapha

Published: 2016

Web link: http://linkinghub.elsevier.com/retrieve/pii/S0040609016001486

Author(s): Hwang, Ya-Hsi: Liu, Lu: Velez, Camilo: Ren, Fan: Gila, Brent P: Hays, David: Pearton, Stephen J: Lambers, Eric: Kravchenko, Ivan I: Lo, Chien-Fong: Johnson, Jerry W

Published: 2013

Web link: http://scitation.aip.org/content/avs/journal/jvstb/31/5/10.1116/1.4816477