参考文献

Veeco CNT ALD customers are at the leading edge of ALD research around the world resulting in more publications than on any other commercial ALD platforms.

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Author(s): Berdova, Maria, Liu, Xuwen, Wiemer, Claudia, Lamperti, Alessio, Tallarida, Grazia, Cianci, Elena, Fanciulli, Marco and Franssila, Sami

Published: 2016

Web link: http://scitation.aip.org/content/avs/journal/jvsta/34/5/10.1116/1.4961113

Author(s): Shen, Jun, Wang, Wei, Chen, Qing, Wang, Mingsheng, Xu, Shengyong, Zhou, Yinglin and Zhang, Xin-Xiang

Published: 2009

Web link: http://stacks.iop.org/0957-4484/20/i=24/a=245307?key=crossref.20258190605a3ebc9f645c4fab27b6a8

Author(s): Jiang, Jing, Wang, Xinhao, Chao, Ran, Ren, Yukun, Hu, Chengpeng, Xu, Zhida and Liu, Gang Logan

Published: 2013

Web link: http://arxiv.org/abs/1312.0329

Author(s): Kern, Christian, Schuster, Vittoria, Kadic, Muamer and Wegener, Martin

Published: 2017

Web link: http://link.aps.org/doi/10.1103/PhysRevApplied.7.044001

Author(s): Spiga, S., Rao, R, Lamagna, L, Wiemer, C., Congedo, G., Lamperti, A, Molle, A., Fanciulli, M., Palma, F and Irrera, F

Published: 2012

Web link: http://link.aip.org/link/JAPIAU/v112/i1/p014107/s1&Agg=doi

Author(s): Li, Luping: Xu, Cheng: Zhao, Yang: Chen, Shikai: Ziegler, Kirk J

Published: 2015

Web link: http://pubs.acs.org/doi/abs/10.1021/acsami.5b02041

Author(s): McCarthy, Robert F, Weimer, Matthew S, Emery, Jonathan D, Hock, Adam S and Martinson, Alex B F

Published: 2014

Web link: http://pubs.acs.org/doi/abs/10.1021/am501331w