参考文献

Veeco CNT ALD customers are at the leading edge of ALD research around the world resulting in more publications than on any other commercial ALD platforms.

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Author(s): Chen, Shih-Yung, Chen, Wei-Liang, Ko, Chung-Ting, Lai, Ming-Yu, Li, Feng-Chieh, Lee, Yu-Yang, Tsai, Kun-Tong, Chen, Miin-Jang, Chang, Yu-Ming and Wang, Yuh-Lin

Published: 2015

Web link: http://iopscience.iop.org/article/10.1088/2053-1591/2/11/115004

Author(s): Waldeck, David H: Bloom, Brian: Mendis, Madu: Wierzbinski, Emil

Published: 2015

Web link: http://pubs.rsc.org/en/content/articlehtml/2015/tc/c5tc03945b

Author(s): Bertuch, Adam: Keller, Brent D: Ferralis, Nicola: Grossman, Jeffrey C: Sundaram, Ganesh

Published: 2016

Web link: http://avs.scitation.org/doi/10.1116/1.4972776

Author(s): Spiga, S., Lamperti, A, Cianci, E and Volpe, F G

Published: 2009

Web link: http://ecst.ecsdl.org/content/25/6/411.short

Author(s): Kim, Bongjun, Geier, Michael L, Hersam, Mark C and Dodabalapur, Ananth

Published: 2017

Web link: http://www.nature.com/articles/srep39627

Author(s): Li, Rui, Lu, Yeqing, Zhou, Guangle, Liu, Qingmin, Chae, Soo Doo, Vasen, Tim, Hwang, Wan Sik, Zhang, Qin, Fay, Patrick, Kosel, Tom, Wistey, Mark, Xing, Huili and Seabaugh, Alan

Published: 2012

Web link: http://ieeexplore.ieee.org/lpdocs/epic03/wrapper.htm?arnumber=6140949

Author(s): Staude, Isabelle, McGuinness, Christopher, Fr�lich, Andreas, Byer, Robert L, Colby, Eric and Wegener, Martin

Published: 2012

Web link: http://www.opticsinfobase.org/abstract.cfm?URI=oe-20-5-5607