参考文献

Veeco CNT ALD customers are at the leading edge of ALD research around the world resulting in more publications than on any other commercial ALD platforms.

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Author(s): Eichler, A, Weiss, M and Scho?nenberger, C

Published: 2011

Web link: http://iopscience.iop.org/0957-4484/22/26/265204

Author(s): McDowell, Matthew T, Lichterman, Michael F, Spurgeon, Joshua M, Hu, Shu, Sharp, Ian D, Brunschwig, Bruce S and Lewis, Nathan S

Published: 2014

Web link: http://pubs.acs.org/doi/abs/10.1021/jp506133y

Author(s): B�low, Tim, Gargouri, Hassan, Siebert, Mirko, Rudolph, Rolf, Johannes, Hans-Hermann and Kowalsky, Wolfgang

Published: 2009

Web link: http://www.nanoscalereslett.com/content/9/1/223

Author(s): Luo, Wei: Lin, Chuan-Fu: Zhao, Oliver: Noked, Malachi: Zhang, Ying: Rubloff, Gary W: Hu, Liangbing

Published: 2016

Web link: http://onlinelibrary.wiley.com/doi/10.1002/aenm.201601526/full

Author(s): Du, Chun, Zhang, Ming, Jang, Ji-Wook, Liu, Yang, Liu, Gang-Yu and Wang, Dunwei

Published: 2014

Web link: http://pubs.acs.org/doi/abs/10.1021/jp5006346

Author(s): Ortega, P, Orpella, A, Mart�n, I, Colina, M, L�pez, G, Voz, C, S�nchez, M I, Molpeceres, C and Alcubilla, R

Published: 2011

Web link: http://doi.wiley.com/10.1002/pip.1115

Author(s): Yuan, Mingjian, Voznyy, Oleksandr, Zhitomirsky, David, Kanjanaboos, Pongsakorn and Sargent, Edward H

Published: 2014

Web link: http://doi.wiley.com/10.1002/adma.201404411