参考文献

Veeco CNT ALD customers are at the leading edge of ALD research around the world resulting in more publications than on any other commercial ALD platforms.

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Author(s): Shim, Jiwook, Rivera, Jose A and Bashir, Rashid

Published: 2013

Web link: http://xlink.rsc.org/?DOI=c3nr02608f

Author(s): Bloom, Brian P: Mendis, Madu N: Wierzbinski, Emil: Waldeck, David H

Published: 2016

Web link: http://pubs.rsc.org/en/content/articlehtml/2016/tc/c5tc03945b

Author(s): Kotilainen, Minna: Krumpolec, Richard: Franta, Daniel: Sou?ek, Pavel: Homola, Tom�?: Cameron, David C.: Vuoristo, Petri

Published: 2017

Web link: http://linkinghub.elsevier.com/retrieve/pii/S0927024817300958