参考文献

Veeco CNT ALD customers are at the leading edge of ALD research around the world resulting in more publications than on any other commercial ALD platforms.

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Author(s): Kim, Hyea: Lee, Jung Tae: Lee, Dong-Chan: Magasinski, Alexandre: Cho, Won il: Yushin, Gleb

Published: 2013

Web link: http://doi.wiley.com/10.1002/aenm.201300253

Author(s): Tapily, K, Gu, D, Baumgart, H and Namkoong, G

Published: 2009

Web link: http://ma.ecsdl.org/content/MA2009-02/23/2018.short

Author(s): Briggs, Justin A: Naik, Gururaj V: Petach, Trevor A: Baum, Brian K: Goldhaber-Gordon, David: Dionne, Jennifer A

Published: 2016

Web link: http://scitation.aip.org/content/aip/journal/apl/108/5/10.1063/1.4941413

Author(s): Wang, Cheng-Yin, Fuentes-Hernandez, Canek, Liu, Jen-Chieh, Dindar, Amir, Choi, Sangmoo, Youngblood, Jeffrey P, Moon, Robert J and Kippelen, Bernard

Published: 2015

Web link: http://pubs.acs.org/doi/abs/10.1021/am508723a

Author(s): Tang, X.: Francis, L. A.: Simonis, P.: Haslinger, M.: Delamare, R.: Deschaume, O.: Flandre, D.: Defrance, P.: Jonas, A. M.: Vigneron, J. P.: Raskin, J. P.

Published: 2012

Web link: http://scitation.aip.org/content/avs/journal/jvsta/30/1/10.1116/1.3669521