参考文献

Veeco CNT ALD customers are at the leading edge of ALD research around the world resulting in more publications than on any other commercial ALD platforms.

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Author(s): Hite, Jennifer: Nepal, Neeraj: Anderson, Virginia R: Freitas, Jaime A: Mastro, Michael A: Eddy, Charles R

Published: 2016

Web link: http://proceedings.spiedigitallibrary.org/proceeding.aspx?doi=10.1117/12.2209111

Author(s): Chien, J F: Huang, Y H: Chang, Y J: Shyue, J J: Yang, J R: Shiojiri, M: Chen, M J

Published: 2012

Web link: http://jss.ecsdl.org/cgi/doi/10.1149/2.033301jss

Author(s): El Hajjam, Khalil: Baboux, Nicolas: Calmon, Francis: Souifi, Abdelkader: Poncelet, Olivier: Francis, Laurent A: Ecoffey, Serge: Drouin, Dominique

Published: 2014

Web link: http://scitation.aip.org/content/avs/journal/jvsta/32/1/10.1116/1.4853075

Author(s): Maret, Hannah, Weisberg, Derek, Chan, Helen M and Strandwitz, Nicholas C

Published: 2016

Web link: http://pubs.acs.org/doi/abs/10.1021/acs.cgd.5b01744

Author(s): Wang, Cheng-Yin, Fuentes-Hernandez, Canek, Chou, Wen-Fang and Kippelen, Bernard

Published: 2016

Web link: http://linkinghub.elsevier.com/retrieve/pii/S1566119916305079

Author(s): Paracchino, Adriana, Laporte, Vincent, Sivula, Kevin, Gr�tzel, Michael and Thimsen, Elijah

Published: 2011

Web link: http://www.nature.com/doifinder/10.1038/nmat3017

Author(s): Zhang, K, Pillai, A D Ramalingom, Tangirala, M, Nminibapiel, D, Bollenbach, K, Cao, W, Baumgart, H, Chakravadhanula, V S K, Kubel, C and Kochergin, V

Published: 2014

Web link: http://doi.wiley.com/10.1002/pssa.201300307

Author(s): Spahr, Holger, Reinker, Johannes, B�low, Tim, Nanova, Diana, Johannes, Hans-Hermann and Kowalsky, Wolfgang

Published: 2013

Web link: http://stacks.iop.org/0022-3727/46/i=15/a=155302?key=crossref.05f52296518d909da3d56dd31f928421