参考文献

Veeco CNT ALD customers are at the leading edge of ALD research around the world resulting in more publications than on any other commercial ALD platforms.

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Author(s): Hoffeditz, William L, Son, Ho-Jin, Pellin, Michael J, Farha, Omar K and Hupp, Joseph T

Published: 2016

Web link: http://pubs.acs.org/doi/abs/10.1021/acsami.6b10844

Author(s): Cheng, Cheng-Wei, Hennessy, John, Antoniadis, Dimitri and Fitzgerald, Eugene A

Published: 2009

Web link: http://link.aip.org/link/APPLAB/v95/i8/p082106/s1&Agg=doi

Author(s): Liu, Jian, Banis, Mohammad Norouzi, Xiao, Biwei, Sun, Qian, Lushington, Andrew, Li, Ruying, Guo, Jinghua, Sham, Tsun-Kong and Sun, Xueliang

Published: 2015

Web link: http://pubs.rsc.org/en/content/articlehtml/2015/ta/c5ta08435k

Author(s): Fu, Wangyang, Nef, Cornelia, Knopfmacher, Oren, Tarasov, Alexey, Weiss, Markus, Calame, Michel and Sch�nenberger, Christian

Published: 2011

Web link: http://pubs.acs.org/doi/abs/10.1021/nl201332c

Author(s): Nayak, Pradipta K, Caraveo-Frescas, J A, Wang, Zhenwei, Hedhili, M N, Wang, Q X and Alshareef, H N

Published: 2014

Web link: http://www.nature.com/doifinder/10.1038/srep04672

Author(s): El-Atab, Nazek, �imen, Furkan, Alkis, Sabri, Orta�, B�lend, Alevli, Mustafa, Dietz, Nikolaus, Okyay, Ali K and Nayfeh, Ammar

Published: 2014

Web link: http://scitation.aip.org/content/aip/journal/apl/104/25/10.1063/1.4885397

Author(s): McCarthy, Robert F, Weimer, Matthew S, Haasch, Richard T, Schaller, Richard D, Hock, Adam S and Martinson, Alex B F

Published: 2016

Web link: http://pubs.acs.org/doi/abs/10.1021/acs.chemmater.5b04402

Author(s): Pascu, O, Caicedo, J M, L�pez-Garc�a, M and Canalejas, V

Published: 2011

Web link: http://pubs.rsc.org/en/content/articlehtml/2011/nr/c1nr10959f