参考文献

Veeco CNT ALD customers are at the leading edge of ALD research around the world resulting in more publications than on any other commercial ALD platforms.

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Author(s): El-Atab, Nazek, Ozcan, Ayse, Alkis, Sabri, Okyay, Ali K and Nayfeh, Ammar

Published: 2014

Web link: http://doi.wiley.com/10.1002/pssr.201409157

Author(s): McConnell, Michael S, Schneider, Louisa C, Karbasian, Golnaz, Rouvimov, Sergei, Orlov, Alexei O and Snider, Gregory L

Published: 2016

Web link: http://scitation.aip.org/content/avs/journal/jvsta/34/1/10.1116/1.4937992

Author(s): Adolfsson, Karl, Schneider, Martina, Hammarin, Greger, H�cker, Udo and Prinz, Christelle N

Published: 2013

Web link: http://stacks.iop.org/0957-4484/24/i=28/a=285101?key=crossref.a3e02b27a0a5a5038bcefd7a854ec7f9

Author(s): Sun, Mengtao, Zhang, Zhenglong, Wang, Peijie, Li, Qiang, Ma, Fengcai and Xu, Hongxing

Published: 2013

Web link: http://www.nature.com/doifinder/10.1038/lsa.2013.68

Author(s): Robinson, Joshua A, LaBella III, Michael, Trumbull, Kathleen A, Weng, Xiaojun, Cavelero, Randall, Daniels, Tad, Hughes, Zachary, Hollander, Mathew, Fanton, Mark and Snyder, David

Published: 2010

Web link: http://pubs.acs.org/doi/abs/10.1021/nn1003138

Author(s): Cheun, Hyeunseok, Fuentes-Hernandez, Canek, Zhou, Yinhua, Potscavage Jr., William J, Kim, Sung-Jin, Shim, Jaewon, Dindar, Amir and Kippelen, Bernard

Published: 2010

Web link: http://pubs.acs.org/doi/abs/10.1021/jp106641j

Author(s): Correa, Gabriela C, Bao, Bo and Strandwitz, Nicholas C

Published: 2015

Web link: http://pubs.acs.org/doi/abs/10.1021/acsami.5b03278