参考文献

Veeco CNT ALD customers are at the leading edge of ALD research around the world resulting in more publications than on any other commercial ALD platforms.

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Author(s): Chai, Yu, Ionescu, Robert, Su, Shanshan, Lake, Roger, Ozkan, Mihrimah and Ozkan, Cengiz S

Published: 2016

Web link: http://onlinelibrary.wiley.com/doi/10.1002/pssa.201532799/full

Author(s): Maggi, Alessandro, Allen, Jessica, Desai, Tejal and Greer, Julia R

Published: 2017

Web link: http://linkinghub.elsevier.com/retrieve/pii/S2352431616302097

Author(s): Warren, Roseanne: Sammoura, Firas: Tounsi, Fares: Sanghadasa, Mohan: Lin, Liwei

Published: 2015

Web link: http://pubs.rsc.org/en/content/articlehtml/2015/ta/c5ta03742e

Author(s): Loozen, X, Larsen, J B, Dross, F, Aleman, M and Bearda, T

Published: 2012

Web link: http://www.sciencedirect.com/science/article/pii/S1876610212007801

Author(s): Thimsen, Elijah, Martinson, Alex B F, Elam, Jeffrey W and Pellin, Michael J

Published: 2012

Web link: http://pubs.acs.org/doi/abs/10.1021/jp302008k

Author(s): Hu, Hang, Dong, Binghai, Hu, Huating, Chen, Fengxiang, Kong, Mengqin, Zhang, Qiuping, Luo, Tianyue, Zhao, Li, Guo, Zhiguang, Li, Jing, Xu, Zuxun, Wang, Shimin, Eder, Dominik and Wan, Li

Published: 2016

Web link: http://pubs.acs.org/doi/abs/10.1021/acsami.6b02701

Author(s): Liu, Xiang, Sun, Qian, Ng, Alan M C, Djuri?i?, A B, Xie, Maohai, Dai, Baohu, Tang, Jinyao, Surya, Charles, Liao, Changzhong and Shih, Kaimin

Published: 2015

Web link: http://pubs.rsc.org/en/content/articlehtml/2015/ra/c5ra22482a

Author(s): Gammon, Peter M, P�rez-Tom�s, Amador, Jennings, Michael R, Guy, Owen J, Rimmer, N, Llobet, J, Mestres, Narcis, Godignon, Phillippe, Placidi, Marcel, Zabala, M, Covington, James A and Mawby, Philip A

Published: 2011

Web link: http://www.scientific.net/MSF.679-680.674