参考文献

Veeco CNT ALD customers are at the leading edge of ALD research around the world resulting in more publications than on any other commercial ALD platforms.

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Performance of ultra?thin HfO2?based MIM devices after oxygen modulation and post?metallization annealing in N2

Author(s): Molina, Joel, Thamankar, Ramesh and Pey, Kin Leong

Published: 2016

Web link: http://onlinelibrary.wiley.com/doi/10.1002/pssa.201532993/full

Cathodoluminescence of Irradiated Hafnium Dioxide

Author(s): Purcell, Emily A

Published: 2011

Web link: http://oai.dtic.mil/oai/oai?verb=getRecord&metadataPrefix=html&identifier=ADA538491

Plasma-Enabled ALD of Niobium Nitride Using an Organometallic Nb Precursor

Author(s): Deguns, Eric: Sowa, Mark J: Dalberth, Mark J: Bhatia, Ritwik: Kanjolia, Ravi: Moser, Dan: Sundaram, Ganesh M: Becker, Jill S

Published: 2010

Web link: http://ecst.ecsdl.org/cgi/doi/10.1149/1.3485254

In0.18Al0.82N/AlN/GaN MIS-HEMT on Si with Schottky-drain contact

Author(s): Chen, P G: Tang, M: Liao, M H: Lee, M H

Published: 2016

Web link: http://linkinghub.elsevier.com/retrieve/pii/S0038110116302258

Optical characteristics of nanocrystalline AlxGa1?xN thin films deposited by hollow cathode plasma-assisted atomic layer deposition

Author(s): Goldenberg, Eda: Ozgit-Akgun, Cagla: Biyikli, Necmi: Okyay, Ali Kemal

Published: 2014

Web link: http://scitation.aip.org/content/avs/journal/jvsta/32/3/10.1116/1.4870381

Interfaces and Composition Profiles in Metal?Sulfide Nanolayers Synthesized by Atomic Layer Deposition

Author(s): Thimsen, Elijah, Baryshev, Sergey V, Martinson, Alex B F, Elam, Jeffrey W, Veryovkin, Igor V and Pellin, Michael J

Published: 2013

Web link: http://pubs.acs.org/doi/abs/10.1021/cm3027225

Unravelling the Role of Electrochemically Active FePO4 Coating by Atomic Layer Deposition for Increased High?Voltage Stability of LiNi0.5Mn1.5O4 Cathode Material

Author(s): Xiao, Biwei, Liu, Jian, Sun, Qian, Wang, Biqiong, Banis, Mohammad Norouzi, Zhao, Dong, Wang, Zhiqiang, Li, Ruying, Cui, Xiaoyu, Sham, Tsun-Kong and Sun, Xueliang

Published: 2015

Web link: http://onlinelibrary.wiley.com/doi/10.1002/advs.201500022/full

Templating Sub-10 nm Atomic Layer Deposited Oxide Nanostructures on Graphene via One-Dimensional Organic Self-Assembled Monolayers

Author(s): Alaboson, Justice M P, Sham, Chun-Hong, Kewalramani, Sumit, Emery, Jonathan D, Johns, James E, Deshpande, Aparna, Chien, TeYu, Bedzyk, Michael J, Elam, Jeffrey W, Pellin, Michael J and Hersam, Mark C

Published: 2013

Web link: http://pubs.acs.org/doi/abs/10.1021/nl4000932

Label-Free FimH Protein Interaction Analysis Using Silicon Nanoribbon BioFETs

Author(s): Wipf, Mathias, Stoop, Ralph L, Navarra, Giulio, Rabbani, Said, Ernst, Beat, Bedner, Kristine, Sch�nenberger, Christian and Calame, Michel

Published: 2016

Web link: http://pubs.acs.org/doi/abs/10.1021/acssensors.6b00089

Numerical modeling of carrier gas flow in atomic layer deposition vacuum reactor: A comparative study of lattice Boltzmann models

Author(s): Pan, Dongqing, Li, Tao, Chien Jen, Tien and Yuan, Chris

Published: 2014

Web link: http://link.aip.org/link/JVTAD6/v32/i1/p01A110/s1&Agg=doi