参考文献

Veeco CNT ALD customers are at the leading edge of ALD research around the world resulting in more publications than on any other commercial ALD platforms.

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Author(s): Maccaferri, Nicol�, E Gregorczyk, Keith, de Oliveira, Thales V A G, Kataja, Mikko, van Dijken, Sebastiaan, Pirzadeh, Zhaleh, Dmitriev, Alexandre, �kerman, Johan, Knez, Mato and Vavassori, Paolo

Published: 2015

Web link: http://www.nature.com/doifinder/10.1038/ncomms7150

Author(s): Goldfinger, Yael: Natan, Michal: Sukenik, Chaim N: Banin, Ehud: Kronenberg, Jona

Published: 2014

Web link: http://www.maneyonline.com/doi/abs/10.1179/1754762813Y.0000000061

Author(s): Ioannou-Sougleridis, V., Karageorgiou, A, Barlas, M, Ladas, S. and Skarlatos, D

Published: 2016

Web link: http://linkinghub.elsevier.com/retrieve/pii/S016793171630106X

Author(s): Dowling, Karen M, Suria, Ateeq J, Shankar, Ashwin, Chapin, Caitlin A and Senesky, Debbie G

Published: 2015

Web link: http://ieeexplore.ieee.org/lpdocs/epic03/wrapper.htm?arnumber=7050944

Author(s): Wheeler, D, Wernersson, L E, Fr�berg, L, Thelander, C, Mikkelsen, A, Weststrate, K J, Sonnet, A, Vogel, E M and Seabaugh, A

Published: 2009

Web link: http://dx.doi.org/10.1016/j.mee.2009.03.091

Author(s): Montiel-Gonz�lez, Z, Castelo-Gonz�lez, O A, Aguilar-Gama, M T, Ram�rez-Morales, E and Hu, H

Published: 2016

Web link: http://linkinghub.elsevier.com/retrieve/pii/S1359431116316015

Author(s): Woo, Ju Yeon, Han, Hyo, Kim, Ji Weon, Lee, Seung-Mo, Ha, Jeong Sook, Shim, Joon Hyung and Han, Chang-Soo

Published: 2016

Web link: http://stacks.iop.org/0957-4484/27/i=26/a=265301?key=crossref.fb762112aef753b3a9bbb56f2e5b7b1a