参考文献

Veeco CNT ALD customers are at the leading edge of ALD research around the world resulting in more publications than on any other commercial ALD platforms.

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Author(s): Xiao, Bo, Pradhan, Sangram K, Santiago, Kevin C, Rutherford, Gugu N and Pradhan, Aswini K

Published: 2015

Web link: http://www.nature.com/articles/srep10393

Author(s): Gregorczyk, Keith E, Pickup, David F, Sanz, Miren Garcia, Irakulis, Itxasne Azpitarte, Rogero, Celia and Knez, Mato

Published: 2014

Web link: http://pubs.acs.org/doi/abs/10.1021/cm503724c

Author(s): Maestro, M, D�az, J, Crespo-Yepes, A, Gonzalez, M B, Martin-Martinez, J, Rodriguez, R, Nafria, M, Campabadal, F and Aymerich, X

Published: 2015

Web link: http://ieeexplore.ieee.org/lpdocs/epic03/wrapper.htm?arnumber=7063791

Author(s): Nielsch, Kornelius, Bachmann, Julien, Daub, Mihaela, Jing, Jing, Knez, Mato, Gosele, Ulrich, Barth, Sven, Mathur, Sanjay, Escrig, Juan and Altbir, Dora

Published: 2007

Web link: http://ecst.ecsdl.org/cgi/doi/10.1149/1.2779078

Author(s): Iwan, Agnieszka, Palewicz, Marcin, Tazbir, Igor, Boharewicz, Bartosz, Pietruszka, Rafal, Filapek, Michal, Wojtkiewicz, Jacek, Witkowski, Bart?omiej S?awomir, Granek, Filip and Godlewski, Marek

Published: 2016

Web link: http://linkinghub.elsevier.com/retrieve/pii/S0013468616301098

Author(s): Tokranov, A: Sheldon, B W: Lu, P: Xiao, X: Mukhopadhyay, A

Published: 2013

Web link: http://jes.ecsdl.org/cgi/doi/10.1149/2.009401jes

Author(s): Elliman, R G, Kim, T H, Shalav, A and Fletcher, N H

Published: 2012

Web link: http://pubs.acs.org/doi/abs/10.1021/jp208484y