参考文献

Veeco CNT ALD customers are at the leading edge of ALD research around the world resulting in more publications than on any other commercial ALD platforms.

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Author(s): Xi, Wang, Schmidt, Christine K, Sanchez, Samuel, Gracias, David H, Carazo-Salas, Rafael E, Butler, Richard, Lawrence, Nicola, Jackson, Stephen P and Schmidt, Oliver G

Published: 2016

Web link: http://pubs.acs.org/doi/abs/10.1021/acsnano.6b00461

Author(s): Yang, Ren Bin, Bachmann, Julien, Pippel, Eckhard, Berger, Andreas, Woltersdorf, J�rg, Go?sele, Ulrich and Nielsch, Kornelius

Published: 2009

Web link: http://doi.wiley.com/10.1002/adma.200803436

Author(s): Gong, Xiao, Ivana, Chin, Hock-Chun, Zhu, Zhu, Lin, You-Ru, Ko, Chih-Hsin, Wann, Clement H and Yeo, Yee-Chia

Published: 2011

Web link: http://esl.ecsdl.org/content/14/3/H117.full

Author(s): Feng, P, M�nch, I, Harazim, S, Huang, G and Mei, Y

Published: 2009

Web link: http://pubs.acs.org/doi/abs/10.1021/nl9016557