参考文献

Veeco CNT ALD customers are at the leading edge of ALD research around the world resulting in more publications than on any other commercial ALD platforms.

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Morphological and chemical stability of silicon nanostructures and their molecular overlayers under physiological conditions: towards long-term implantable ?

Author(s): Peled, A, Pevzner, A and Soroka, H P

Published: 2014

Web link: http://www.biomedcentral.com/content/pdf/1477-3155-12-7.pdf

Durable superhydrophobic wool fabrics coating with nanoscale Al2O3 layer by atomic layer deposition

Author(s): Xiao, Xingfang, Cao, Genyang, Chen, Fengxiang, Tang, Yunrong, Liu, Xin and Xu, Weilin

Published: 2015

Web link: http://linkinghub.elsevier.com/retrieve/pii/S0169433215011800

Plasmonically enhanced hot electron based photovoltaic device

Author(s): Atar, F B, Battal, E, Aygun, L E and Daglar, B

Published: 2013

Web link: http://bg.unam.bilkent.edu.tr/files/papers/Plasmonically%20enhanced%20hot%20electron%20based%20photovoltaic%20device.pdf

Al2O3 surface passivation: Electrical characterization using the Quantox tool

Author(s): Rothschild, A., Nishibe, S, Cui, J, Zhu, N, Debucquoy, M, Mamagkakis, S, Nagaswami, V and John, J.

Published: 2011

Web link: http://ieeexplore.ieee.org/lpdocs/epic03/wrapper.htm?arnumber=6186245

Spatial resolution in thin film deposition on silicon surfaces by combining silylation and UV/ozonolysis

Author(s): Guo, Lei and Zaera, Francisco

Published: 2014

Web link: http://stacks.iop.org/0957-4484/25/i=50/a=504006?key=crossref.b9f6a53f67addc4e33e07930d063e197

Patterning at the 10 nanometer length scale using a strongly segregating block copolymer thin film and vapor phase infiltration of inorganic precursors

Author(s): Choi, Jonathan W, Li, Zhaodong, Black, Charles T, Sweat, Daniel P, Wang, Xudong and Gopalan, Padma

Published: 2016

Web link: http://pubs.rsc.org/en/content/articlehtml/2016/nr/c6nr01409g

Inversion in the In0.53Ga0.47As metal-oxide-semiconductor system: Impact of the In0.53Ga0.47As doping concentration

Author(s): OConnor, E: Cherkaoui, K: Monaghan, S.: Sheehan, B: Povey, I. M.: Hurley, P K

Published: 2017

Web link: http://aip.scitation.org/doi/10.1063/1.4973971

Arbitrary lattice symmetries via block copolymer nanomeshes

Author(s): Majewski, Pawel W, Rahman, Atikur, Black, Charles T and Yager, Kevin G

Published: 2015

Web link: http://www.nature.com/doifinder/10.1038/ncomms8448

Enhanced non-volatile memory characteristics with quattro-layer graphene nanoplatelets vs . 2.85-nm Si nanoparticles with asymmetric Al2O3 /HfO2 tunnel oxide – Springer

Author(s): El-Atab, Nazek and Nayfeh, Ammar

Published: 2015

Web link:

Zirconium Doping in Titanium Oxide Photocatalytic Films Prepared by Atomic Layer Deposition

Author(s): Qiu, Shenghong and Starr, Thomas L

Published: 2007

Web link: http://jes.ecsdl.org/cgi/doi/10.1149/1.2718475