参考文献

Veeco CNT ALD customers are at the leading edge of ALD research around the world resulting in more publications than on any other commercial ALD platforms.

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Author(s): Xiong, Shisheng: Wan, Lei: Ishida, Yoshihito: Chapuis, Yves-Andre: Craig, Gordon S W: Ruiz, Ricardo: Nealey, Paul F

Published: 2016

Web link: http://pubs.acs.org/doi/abs/10.1021/acsnano.6b03667

Author(s): Gabriel, Nicholas T, Kim, Sangho S and Talghader, Joseph J

Published: 2010

Web link: https://www.osapublishing.org/abstract.cfm?uri=OIC-2010-WD2

Author(s): Tiwari, Shree Prakash, Kim, Jungbae, Knauer, Keith A, Hwang, Do Kyung, Polander, Lauren E, Barlow, Stephen, Marder, Seth R and Kippelen, Bernard

Published: 2012

Web link: http://linkinghub.elsevier.com/retrieve/pii/S1566119912001334

Author(s): Botzakaki, M A, Xanthopoulos, N, Makarona, E, Tsamis, C, Kennou, S, Ladas, S., Georga, S N and Krontiras, C A

Published: 2013

Web link: http://linkinghub.elsevier.com/retrieve/pii/S0167931713002189

Author(s): Pradhan, A. K., Mundle, R M, Santiago, Kevin, Skuza, J R, Xiao, Bo, Song, K D, Bahoura, M., Cheaito, Ramez and Hopkins, Patrick E

Published: 2014

Web link: http://www.nature.com/doifinder/10.1038/srep06415