参考文献

Veeco CNT ALD customers are at the leading edge of ALD research around the world resulting in more publications than on any other commercial ALD platforms.

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Author(s): Choi, Sangmoo, Larrain, Felipe A, Wang, Cheng-Yin, Fuentes-Hernandez, Canek, Chou, Wen-Fang and Kippelen, Bernard

Published: 2016

Web link: http://pubs.rsc.org/en/content/articlehtml/2016/tc/c6tc02028c

Author(s): Haider, Ali: Ozgit-Akgun, Cagla: Kayaci, Fatma: Okyay, Ali Kemal: Uyar, Tamer: Biyikli, Necmi

Published: 2014

Web link: http://scitation.aip.org/content/aip/journal/aplmater/2/9/10.1063/1.4894782

Author(s): Parize, Romain: Cossuet, Thomas: Chaix-Pluchery, Odette: Roussel, Herv�: Appert, Estelle: Consonni, Vincent

Published: 2017

Web link: http://linkinghub.elsevier.com/retrieve/pii/S0264127517301624

Author(s): Emery, Jonathan D, Schlep�tz, Christian M, Guo, Peijun, Chang, Robert P H and Martinson, Alex B F

Published: 2015

Web link: http://pubs.acs.org/doi/10.1021/acs.cgd.5b01086

Author(s): Jeong, Hyeon-Ho, Mark, Andrew G and Fischer, Peer

Published: 2016

Web link: http://pubs.rsc.org/en/content/articlehtml/2016/cc/c6cc06800f

Author(s): Troiano, Julianne, Jordan, David S, Hull, Chris and Geiger, Franz M

Published: 2013

Web link: http://pubs.acs.org/doi/abs/10.1021/jp3122819