参考文献

Veeco CNT ALD customers are at the leading edge of ALD research around the world resulting in more publications than on any other commercial ALD platforms.

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Author(s): Ju, Ling, Bao, Bo, King, Sean W and Strandwitz, Nicholas C

Published: 2016

Web link: http://avs.scitation.org/doi/10.1116/1.4972418

Author(s): Wang, Chao, Qian, Long, Xu, Wenya, Nie, Shuhong, Gu, Weibing, Zhang, Jianhui, Zhao, Jianwen, Lin, Jian, Chen, Zheng and Cui, Zheng

Published: 2013

Web link: http://pubs.rsc.org/en/Content/ArticleLanding/2013/NR/c3nr34304a

Author(s): Zhang, Lianbing, Patil, Avinash J, Li, Le, Schierhorn, Angelika, Mann, Stephen, Go?sele, Ulrich and Knez, Mato

Published: 2009

Web link: http://doi.wiley.com/10.1002/anie.200900426

Author(s): Liu, Mingzhao, Nam, Chang-Yong, Black, Charles T, Kamcev, Jovan and Zhang, Lihua

Published: 2013

Web link: http://pubs.acs.org/doi/abs/10.1021/jp404032p