参考文献

Veeco CNT ALD customers are at the leading edge of ALD research around the world resulting in more publications than on any other commercial ALD platforms.

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Author(s): Michaelson, S, Akhvlediani, R, Milshtein, I, Hoffman, A, Meyler, B, Salzman, J, Lipp, E, Shima-Edelstein, R and Roizin, Y

Published: 2012

Web link: http://ssl.ecsdl.org/cgi/doi/10.1149/2.001202ssl

Author(s): Guziewicz, El?bieta, Godlewski, Marek, Krajewski, Tomasz A, Wachnicki, ?ukasz, ?uka, Grzegorz, Domaga?a, Jaros?aw Z, Paszkowicz, Wojciech, Kowalski, Bogdan J, Witkowski, Bart?omiej S, Du?y?ska, Anna and Suchocki, Andrzej

Published: 2010

Web link: http://doi.wiley.com/10.1002/pssb.200983699

Author(s): Yang, F and Rogero, Celia

Published: 2016

Web link:

Author(s): Vermang, Bart, Goverde, Hans, Tous, Loic, Lorenz, Anne, Choulat, Patrick, Horzel, Jorg, John, Joachim, Poortmans, Jef and Mertens, Robert

Published: 2012

Web link: http://doi.wiley.com/10.1002/pip.2196

Author(s): G�rrn, Patrick, Riedl, Thomas and Kowalsky, Wolfgang

Published: 2009

Web link: http://pubs.acs.org/doi/abs/10.1021/jp9018487

Author(s): Yang, Yingchao: Liang, Xin: Chen, Weibing: Cao, Linlin: Li, Minglin: Sheldon, Brian W: Lou, Jun

Published: 2015

Web link: http://linkinghub.elsevier.com/retrieve/pii/S0008622315302050

Author(s): Sol�s-Pomar, Francisco, Mart�nez, Eduardo, Mel�ndrez, Manuel F and P�rez-Tijerina, Eduardo

Published: 2011

Web link: http://www.nanoscalereslett.com/content/6/1/524

Author(s): Campabadal, F, Raf�, J M, Gonzalez, M B, Zabala, M, Beldarrain, O, Acero, M C and Duch, M

Published: 2013

Web link: http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=6481327' escapeXml='false'/>

Author(s): Hoffeditz, William L, Katz, Michael J, Deria, Pravas, Martinson, Alex B F, Pellin, Michael J, Farha, Omar K and Hupp, Joseph T

Published: 2014

Web link: http://pubs.acs.org/doi/abs/10.1021/am501455b