参考文献

Veeco CNT ALD customers are at the leading edge of ALD research around the world resulting in more publications than on any other commercial ALD platforms.

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Author(s): Ahn, Jong Hyun, Zhu, Zhengtao, Park, Sang Il, Xiao, Jianliang, Huang, Yonggang and Rogers, John A

Published: 2008

Web link: http://doi.wiley.com/10.1002/adfm.200800176

Author(s): Tapily, K, Apparaju, S, Rozgonyi, G and Gu, D

Published: 2010

Web link: http://ma.ecsdl.org/content/MA2010-02/22/1552.short

Author(s): Henkel, C, Abermann, S and Bethge, O

Published: 2010

Web link: http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=5610718

Author(s): Vermang, Bart, Rothschild, Aude, Kenis, Karine, Wostyn, Kurt, Bearda, Twan, Racz, A., Loozen, X, John, Joachim, Mertens, Paul W, Poortmans, Jef and Mertens, Robert P

Published: 2012

Web link: http://www.scientific.net/SSP.187.357

Author(s): Yang, Po-Shuan, Cheng, Po-Hsien, Kao, C Robert and Chen, Miin-Jang

Published: 2016

Web link: http://www.nature.com/articles/srep29625