参考文献

Veeco CNT ALD customers are at the leading edge of ALD research around the world resulting in more publications than on any other commercial ALD platforms.

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Author(s): G�llentoft, Lina, Pettersson, Lina M E, Danielsen, Nils, Schouenborg, Jens, Prinz, Christelle N and Linsmeier, Cecilia Eriksson

Published: 2015

Web link: http://www.sciencedirect.com/science/article/pii/S0142961214012289

Author(s): Molpeceres, Carlos, S�nchez-Aniorte, Mar�a Isabel, Morales, Miguel, Mu�oz, David, Mart�n, Isidro, Ortega, Pablo, Colina, M�nica, Voz, Crist�bal and Alcubilla, Ram�n

Published: 2012

Web link: http://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=1379709

Author(s): Yeh, T C, Zhu, Q, Buchholz, D B, Martinson, A B, Chang, R P H and Mason, T O

Published: 2015

Web link: http://www.sciencedirect.com/science/article/pii/S0169433215000367

Author(s): Jin fan, Hong, Knez, Mato, Scholz, Roland, Nielsch, Kornelius, Pippel, Eckhard, Hesse, Dietrich, Zacharias, Margit and Go?sele, Ulrich

Published: 2006

Web link: http://www.nature.com/doifinder/10.1038/nmat1673

Author(s): Walsh, R B, Howard, S C, Nelson, A and Skinner, W M

Published: 2012

Web link: http://japanlinkcenter.org/DN/JST.JSTAGE/cl/2012.1247?from=Google

Author(s): Schie�l, Stefan P, Fr�hlich, Nils, Held, Martin, Gannott, Florentina, Schweiger, Manuel, Forster, Michael, Scherf, Ullrich and Zaumseil, Jana

Published: 2014

Web link: http://pubs.acs.org/doi/abs/10.1021/am506971b

Author(s): Wang, Wei-Cheng, Lin, Che-Wei, Chen, Hsin-Jui, Chang, Che-Wei, Huang, Jhih-Jie, Yang, Ming-Jui, Tjahjono, Budi, Huang, Jian-Jia, Hsu, Wen-Ching and Chen, Miin-Jang

Published: 2013

Web link: http://pubs.acs.org/doi/abs/10.1021/am402889k