参考文献

Veeco CNT ALD customers are at the leading edge of ALD research around the world resulting in more publications than on any other commercial ALD platforms.

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Author(s): Yates, Heather M: Afzaal, Mohammad: Walter, Arnaud: Hodgkinson, John L: Moon, Soo-Jin: Sacchetto, Davide: Br�uninger, Matthias: Niesen, Bj�rn: Nicolay, Sylvain: McCarthy, Melissa: Pemble, Martyn E: Povey, Ian M: Ballif, Christophe

Published: 2016

Web link: http://pubs.rsc.org/en/content/articlehtml/2016/tc/c6tc04647a

Author(s): Ceylan, Hakan, Ozgit-Akgun, Cagla, Erkal, Turan S, Donmez, Inci, Garifullin, Ruslan, Tekinay, Ayse B, Usta, Hakan, Biyikli, Necmi and Guler, Mustafa O

Published: 2013

Web link: http://www.nature.com/doifinder/10.1038/srep02306

Author(s): Poncelet, Olivier: Tallier, Guillaume: Mouchet, S�bastien R: Crahay, Andr�: Rasson, Jonathan: Kotipalli, Ratan: Deparis, Olivier: Francis, Laurent A

Published: 2016

Web link: http://stacks.iop.org/1748-3190/11/i=3/a=036011?key=crossref.416076e32876d036271b2c9614b350ed

Author(s): Maindron, Tony, Aventurier, Bernard, Ghazouani, Ahlem, Jullien, Tony, Rochat, N�vine, Simon, Jean-Yves and Viasnoff, Emilie

Published: 2013

Web link: http://linkinghub.elsevier.com/retrieve/pii/S004060901301403X

Author(s): Guziewicz, E, Godlewski, M, Krajewski, T, Wachnicki, ?, Szczepanik, A, Kopalko, K, W�jcik-G?odowska, A, Prze?dziecka, E, Paszkowicz, W, ?usakowska, E, Kruszewski, P, Huby, N, Tallarida, G and Ferrari, S

Published: 2009

Web link: http://link.aip.org/link/JAPIAU/v105/i12/p122413/s1&Agg=doi

Author(s): Hwang, Ya-Hsi: Ahn, Shihyun: Dong, Chen: Ren, Fan: Gila, Brent P: Hays, David: Pearton, Stephen J: Lo, Chien-Fong: Johnson, Jerry W

Published: 2014

Web link: http://scitation.aip.org/content/avs/journal/jvstb/32/5/10.1116/1.4891966

Author(s): Davami, Keivan, Jiang, Yijie, Cortes, John, Chen, Lin, Shaygan, Mehrdad, Turner, Kevin T and Bargatin, Igor

Published: 2016

Web link: http://iopscience.iop.org/article/10.1088/0957-4484/27/15/155701

Author(s): Puyoo, E: Malhaire, C: Thomas, D: Rafa�l, R: R'Mili, M: Malch�re, A: Roiban, L: Koneti, S: Bugnet, M: Sabac, A: Le Berre, M

Published: 2017

Web link: http://aip.scitation.org/doi/10.1063/1.4978778