参考文献

Veeco CNT ALD customers are at the leading edge of ALD research around the world resulting in more publications than on any other commercial ALD platforms.

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Author(s): Shim, Jae Won, Fuentes-Hernandez, Canek, Zhou, Yinhua, Dindar, Amir, Khan, Talha M, Giordano, Anthony J, Cheun, Hyeunseok, Yun, Minseong, Marder, Seth R and Kippelen, Bernard

Published: 2014

Web link: http://doi.wiley.com/10.1002/aenm.201400048

Author(s): Muller, Nicolas, Haberko, Jakub, Marichy, Catherine and Scheffold, Frank

Published: 2013

Web link: http://doi.wiley.com/10.1002/adom.201300415

Author(s): Yang, Jie, Tong, Ling, Yang, Yang, Chen, Xiaoqiang, Huang, Jun, Chen, Rizhi and Wang, Yong

Published: 2013

Web link: http://xlink.rsc.org/?DOI=c3tc30802b

Author(s): Lee, S M and Dresbach, C

Published: 2009

Web link: http://xlink.rsc.org/?DOI=b905768d

Author(s): Healy, Ken, Ray, Vishva, Willis, Lauren J, Peterman, Neil, Bartel, John and Drndi?, Marija

Published: 2012

Web link: http://doi.wiley.com/10.1002/elps.201200350

Author(s): Pascu, Oana, Gich, Mart�, Herranz, Gervasi and Roig, Anna

Published: 2012

Web link: http://doi.wiley.com/10.1002/ejic.201101244

Author(s): Zhang, Kai, Tangirala, Madhavi, Nminibapiel, David, Pallem, Venkateswara, Dussarrat, Christian and Baumgart, Helmut

Published: 2012

Web link: http://ma.ecsdl.org/content/MA2012-02/28/2484.abstract

Author(s): Thimsen, Elijah, Peng, Qing, Martinson, Alex B F, Pellin, Michael J and Elam, Jeffrey W

Published: 2011

Web link: http://pubs.acs.org/doi/abs/10.1021/cm201412p