参考文献

Veeco CNT ALD customers are at the leading edge of ALD research around the world resulting in more publications than on any other commercial ALD platforms.

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Author(s): Huang, Jhih-Jie: Tsai, Yi-Jen: Tsai, Meng-Chen: Huang, Li-Tien: Lee, Min Hung: Chen, Miin-Jang

Published: 2015

Web link: http://linkinghub.elsevier.com/retrieve/pii/S0169433214024647

Author(s): Ozgit-Akgun, Cagla: Kayaci, Fatma: Vempati, Sesha: Haider, Ali: Celebioglu, Asli: Goldenberg, Eda: Kizir, Seda: Uyar, Tamer: Biyikli, Necmi

Published: 2015

Web link: http://pubs.rsc.org/en/content/articlehtml/2015/tc/c5tc00343a

Author(s): Aguilar-Gama, M Tulio, Ram�rez-Morales, Erik, Montiel-Gonz�lez, Z, Mendoza-Galv�n, A, Sotelo-Lerma, M�rida, Nair, P K and Hu, Hailin

Published: 2014

Web link: http://link.springer.com/10.1007/s10854-014-2111-z

Author(s): Song, Wenjing, Vannucci, Aaron K, Farnum, Byron H, Lapides, Alexander M, Brennaman, M Kyle, Kalanyan, Ber�, Alibabaei, Leila, Concepcion, Javier J, Losego, Mark D, Parsons, Gregory N. and Meyer, Thomas J

Published: 2014

Web link: http://pubs.acs.org/doi/abs/10.1021/ja505022f

Author(s): Dong, H., Cabrera, W, Galatage, R V, KC, Santosh, Brennan, B, Qin, X, McDonnell, S, Zhernokletov, D, Hinkle, C L, Cho, K, Chabal, Y J and Wallace, R M

Published: 2013

Web link: http://link.aip.org/link/APPLAB/v103/i6/p061601/s1&Agg=doi

Author(s): Zhao, Liang, Zhao, Junmei, Hu, Yong-Sheng, Li, Hong, Zhou, Zhibin, Armand, Michel and Chen, Liquan

Published: 2012

Web link: http://doi.wiley.com/10.1002/aenm.201200166